Barrier-limited surface diffusion in atom lithography
نویسندگان
چکیده
منابع مشابه
Atom lithography with metastable helium
A bright metastable helium He beam is collimated sequentially with the bichromatic force and three optical molasses velocity compression stages. Each He atom in the beam has 20 eV of internal energy that can destroy a molecular resist assembled on a gold coated silicon wafer. Patterns in the resist are imprinted onto the gold layer with a standard selective etch. Patterning of the wafer with th...
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– In atom lithography, neutral atoms are focused by laser light to form a periodic pattern on a substrate. We have realized two-dimensional structuring of chromium on a silicon substrate employing a polarization gradient light mask with uniform intensity. The generated structures exhibit peak-to-peak distances below half the laser wavelength. The results are explained by a theoretical model whi...
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We have used a metastable argon beam to expose gold-coated silicon substrates covered with a self assembled monolayer (SAM) resist. The substrates have been covered with a patterned mask, with feamres of 10 pm size, and exposed to the atomic beam. Subsequent etching revealed negative contrast patterns, consistent with the formation of a negative contamination resist in the SAM, which we attribu...
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In neutral atom lithography, a collimated beam of atoms is sent through a region of standing light waves created by interfering laser beams. The intensity distribution of the light field modulates the density distribution of the atoms transversal to the beam direction. The atomic beam materializes on a substrate, and the atoms are deposited in a pattern which mimics the intensity distribution o...
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The diffusion and low frequency vibrational motions of atoms and molecules on surfaces can be measured by means of quasielastic helium atom scattering. In this paper, we discuss and investigate different analytical approximations, based on the theory of stochastic processes, to the dynamic structure factor, considering the two motions on an equal footing. Special emphasis is put on the nature o...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2004
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1638613